STOF Command Data Format (16 Bit)
Address Data I/O- Subformats
CMD Execution
B15..B12 B11...B0 Mode
15 ASIC Write WR 15: ASIC 2 Mode Control-LO Immediate
WR 14: ASIC 2 Mode
Control-HI Immediate
WR 13: ASIC 2 Sampling Control-LO Immediate
WR
12: ASIC 2 Sampling Control-HI Immediate
WR 7: ASIC 1 Mode Control-LO
Immediate
WR 6: ASIC 1 Mode Control-HI Immediate
WR 5: ASIC 1
Sampling Control-LO Immediate
WR 4: ASIC 1 Sampling Control-HI
Immediate
14 ASIC Read RD 8: ASIC 2 Counter Bit 23:0 Immediate
RD
0: ASIC 1 Counter Bit 23:0 Immediate
13 Cover/SEM Control WR
Immediate
12 HV-Sweep-S WR Immediate
11 HV-Control WR 3: HV-Enable
Immediate
WR 2: HV-Defl-HSTOF Setting Immediate
WR 1: SPARE DAC
Setting Immediate
WR 0: HV-Switching Immediate
continued next
page
continued: STOF Command Data Format (16 Bit)
Address
Data I/O- Subformats CMD Execution
B15..B12 B11...B0 Mode
10 Housekeeping WR/RD 3: Write MUX Address, Read HSKPG Data Immediate
WR
2: Write MUX Address Immediate
RD 1: Read HSKPG Data Immediate
9
Data-I/F Control WR Immediate
8 Int.Cal. Control WR Immediate
7
PHA-Control WR 2: EVS-Control Immediate
WR 0: POS-Enable Immediate
6
Bias Control WR 3: MCP2-Bias Setting (DAC_B) Immediate
WR 2: MCP1-Bias
Setting Immediate
WR 1: SSD-Bias Setting (DAC_B) Immediate
WR 0:
SSD-Grid Setting Immediate
5 Offset Correction B WR Immediate
4
Offset Correction A WR Immediate
3 CAMEX Control WR 3: Pixel-Mask[31:16]
Immediate
WR 2: Pixel-Mask[15:0] Immediate
WR 1: Offset ACCU-S
Start of PHA-Step
WR 0: Offset ACCU-H Start of PHA-Step
continued next page
continued: STOF Command Data Format (16 Bit)
Address
Data I/O- Subformats CMD Execution
B15..B12 B11...B0 Mode
2 SSD Control WR 3: SSD Diagnostics Start of PHA-Step
WR 2: SSD Gain
Control Start of PHA-Step
WR 1: SSD Stim Control Start of PHA-Step
WR 0: SSD Stim Mask Start of PHA-Step
1 DAC/TAC Control WR 3: SSD-DAC
Setting Start of PHA-Step
WR 2: TAC-DAC-Setting Start of PHA-Step
WR 1: Threshold-TOF-S Start of PHA-Step
WR 0: Threshold-TOF-H Start of
PHA-Step
0 SSD-Threshold WR 3: Threshold-LS Start of PHA-Step
WR 2:
Threshold-LH Start of PHA-Step
WR 1: Threshold-ACC-S Start of
PHA-Step
WR 0: Threshold-ACC-H Start of PHA-Step
a) STOF Housekeeping Multiplexer Assignment
STOF Housekeeping Multiplexer Assignment
Analog MUX Temp MUX
Status SEL Return Data Remark
B4..B0 B6...B5 B7 D17...D8
XX XX 1 * Return Data D7...D0: Status Word 1 valid for all MUX States
XX
XX 0 * Return Data D7...D0: Status Word 0 valid for all MUX States
31
Spare Analog Mux 2 (STOF-HV)
30 Regulator Sweep 2 "
29 Regulator
Sweep 1 "
28 Regulator HSTOF-HV "
27 Spare "
26 Spare
"
25 1 Temperature Analyzer Frame "
25 0 Temperature Sunshade
"
24 STOF Sweep 2 HV-Monitor High Range "
23 STOF Sweep 2
HV-Monitor Low Range "
22 STOF Sweep 2 Current Monitor "
21 STOF
Sweep 1 HV-Monitor High Range "
20 STOF Sweep 1 HV-Monitor Low Range
"
19 STOF Sweep 1 Current Monitor "
18 HSTOF Analyzer HV-Monitor
"
17 HSTOF Analyzer Current Monitor "
16 1 Temperature Sweep-HV
Housing "
16 0 Temperature Sweep HV-Converter continued next
page
STOF Housekeeping Multiplexer Assignment (continued)
Analog
MUX Temp MUX Status SEL Return Data Remark
B4..B0 B6...B5 B7 D17...D8
15 -12V SEM Power Monitor Analog Mux 1 (SEM-BOARD)
14 +12V SEM Power
Monitor "
13 Control MCP 2 "
12 Control MCP 1 "
11 DAC MCP
2 "
10 DAC MCP 1 "
9 SSD Bias Voltage Monitor "
8 SSD Grid
Voltage Monitor "
continued next pageSTOF Housekeeping
Multiplexer Assignment (continued)
Analog MUX Temp MUX Status SEL
Return Data Remark
B4..B0 B6...B5 B7 D17...D8
7 2 Temperature TOF-Section, Top of Housing Analog Mux 0 (CMD-BOARD)
7 1
Temperature SSD-Section, Housing "
7 0 Temperature SSD-Section, internal
"
6 2 Spare "
6 1 Temperature Baseplate, Reference Point "
6 0
Spare "
5 +12 Volt Monitor "
4 -12 Volt Monitor "
3 +5
Volt Monitor "
2 -5 Volt Monitor "
1 LV-Converter Current Monitor
"
0 2 Temperature STOF E-Box, Reference Point "
0 1 Temperature STOF
E-Box, LV Conv Board "
0 0 Temperature SEM Sensor "
IV. STOF-Rate Data
STOF-Rate Data, Regular Mode (1 Energy Step)
Rates Read- Bits
Sub-
Counter Outs Total
Priority Rates:
1 : 3 STOF_LO_PRY1 (Preselection) 1 1 12
1 : 4
STOF_HI_PRY1 (Preselection) 1 1 12
1 : 5 HSTOF_LO_PRY1 (Preselection) 1 1
12
1 : 6 HSTOF_HI_PRY1 (Preselection) 1 1 12
Monitor Rates:
1
: 7 STOF_LO_PRY2 (Final Selection) 1 1 12
1 : 8 STOF_HI_PRY2 (Final
Selection) 1 1 12
1 : 9 HSTOF_LO_PRY2 (Final Selection) 1 1 12
1 : 10
HSTOF_HI_PRY2 (Final Selection) 1 1 12
1 : 1 * STROBE_1 (Preselection Rate)
1 1 12
1 : 11 * REJ_PRESEL (Rejection Rate Preselection) 1 1 12
1 : 2 *
STROBE_2 (Final Selection Rate) 1 1 12
1 : 12 * REJ_FINSEL (Rejection Rate
Final Selection) 1 1 12 144
12 144
* = Samples on Housekeeping
Format continued next page
continued: STOF Rate Data, Regular Mode (1 Energy Step) Rates
Read- Bits Sub-
Counter Outs Total
from previous page: 12 144
Monitor Rates: (continued)
1 : 13
SF (Start Rate) 1 1/4 3
1 : 14 SFR (TAC Rate) 1 1/4 3
1 : 15 PFS4
(Start Pos Rates STOF) 1 1/4 3
1 : 16 PFS3 (Start Pos Rates STOF) 1 1/4
3
1 : 17 PFS2 (Start Pos Rates STOF) 1 1/4 3
1 : 18 PFS1 (Start Pos
Rates STOF) 1 1/4 3
1 : 19 PFH4 (Start Pos Rates HSTOF) 1 1/4 3
1 : 20
PFH3 (Start Pos Rates HSTOF) 1 1/4 3
1 : 21 PFH2 (Start Pos Rates HSTOF) 1
1/4 3
1 : 22 PFH1 (Start Pos Rates HSTOF) 1 1/4 3
1 : 23 PRS (Stop Pos
Rate STOF) 1 1/4 3
1 : 24 PRH (Stop Pos Rate HSTOF) 1 1/4 3
2 : 1 LS_3
(SSD Threshold STOF) 1 1/4 3
2 : 2 LS_2 (SSD Threshold STOF) 1 1/4 3
2
: 3 LS_1 (SSD Threshold STOF) 1 1/4 3
2 : 4 LS_0 (SSD Threshold STOF) 1
1/4 3 48
28 192
continued next page
continued: STOF Rate Data, Regular Mode (1 Energy Step) Rates
Read- Bits Sub-
Counter Outs Total
from previous page: 28 192
Monitor Rates: (continued)
2 : 19
ACS/H3 (ACCU-S/High-SSD Threshold) 1 1/4 3
2 : 18 ACH/H2 (ACCU-H/High-SSD
Threshold) 1 1/4 3
2 : 16 H1 (High-SSD Threshold) 1 1/4 3
2 : 17 H0
(High-SSD Threshold) 1 1/4 3
2 : 5 LH/LS_1 (HSTOF/STOF SSD Threshold) 1 1/4
3
2 : 6 LH/LS_0 (HSTOF/STOF SSD Threshold) 1 1/4 3
2 : 7 MULT_PFS
(Multiple Start Pos STOF) 1 1/4 3
2 : 8 MULT_PFH (Multiple Start Pos HSTOF)
1 1/4 3
2 : 9 CROSS_PR (Pos Cross Response, Presel) 1 1/4 3
2 : 10
MULT_SSD (Multiple SSD Response) 1 1/4 3
2 : 11 STOF_CROSS_RESP (STOF Cross
Response, Fin.Sel) 1 1/4 3
2 : 12 HSTOF_CROSS_RESP (HSTOF Cross Response,
Fin.Sel) 1 1/4 3
2 : 20 LOGIC_RESET 1 1/4 3 39
EUV
Rates:
2 : 13 EUV_3 1 1/4 3
2 : 14 EUV_2 1 1/4 3
2 : 15 EUV_1
1 1/4 3 9
44 240
V. STOF Housekeeping Data Format
STOF Housekeeping Data,(Main Housekeeping Format every 14.98
sec)
AMUX Read- Byte Sub-
ADDR Conversion Outs
Total
Voltage Step of 1st STOF Sweep Reading 1 1
24 STOF Sweep2
HV-Monitor *) Range 1: 19.8348 [V] 4 4
23
(every 3rd Vltg Step) Range 0: 2.47579 [V]
21 STOF
Sweep1 HV Monitor *) Range 1: 19.7407 [V] 4
4
20 (every 3rd Vltg Step) Range 0: 2.45848 [V]
18
HSTOF Analyzer HV-Monitor 19.7404 [V] 1 1
11 DAC MCP 2 15.474 [V] 1 1
10
DAC MCP 1 15.474 [V] 1 1
9 SSD Bias Monitor -0.1961 [V] 1 1
8 SSD Grid
Monitor -0.019569 [V] 1 1
Sel=0 Status Word 0 1 1
Sel=1 Status Word 1 1
1 16
Subcommutated Data (see Subcom Format) 1 18 18
Total Byte 34
*) = Monitor High/Low Range depends on
Voltage Step
A. Housekeeping Data: Subcom Format 0
STOF Subcommutated Housekeeping Data, (Subcom Format 0, every 59.92
sec)
AMUX:TMUX Read- Byte Sub-
ADDRESS Conversion Outs Total
25 : 0 Sunshade Temperature 1.442 [deg.], Offset -273 [deg.] 1 1
6 : 1
Baseplate Temperature Reference Point 1.442 [deg.], Offset -273 [deg.] 1
1
25 : 1 Defl. Plates Mountingframe Temperature 1.442 [deg.], Offset -273
[deg.] 1 1
16 : 0 Sweep HV-Converter Temperature 1.442 [deg.], Offset -273
[deg.] 1 1
16 : 1 Sweep-HV Housing Temperature 1.442 [deg.], Offset -273
[deg.] 1 1
7 : 2 Housing Temperature, Top of TOF Section 1.442 [deg.],
Offset -273 [deg.] 1 1
7 : 1 Housing Temperature, SSD Section 1.442 [deg.],
Offset -273 [deg.] 1 1
7 : 0 SSD Section Temperature, internal 1.442 [deg.],
Offset -273 [deg.] 1 1
0 : 2 STOF E-Box Temperature Reference Point 1.442
[deg.], Offset -273 [deg.] 1 1
0 : 1 STOF E-Box internal Temp, LV Converter
1.442 [deg.], Offset -273 [deg.] 1 1
0 : 0 EUV Temperature 1.442 [deg.],
Offset -273 [deg.] 1 1
Spare 1 1
Spare 1 1
Spare 1 1
Spare
1 1
Spare 1 1
Spare 1 1
17 : X HSTOF Analyzer Current Monitor
0.09804 [mA] 1 1 18
Total Byte 18
B. Housekeeping Data: Subcom Format 1
STOF Subcommutated Housekeeping Data, (Subcom Format 1, every 59.92
sec)
Read- Byte Sub-
Counter Outs Total
1 : 1 Preselection Rate (Strobe_1) 1 1.5
1 : 11 Rejection Rate PRESEL
(PRESEL-N x Strobe_1) 1 1.5
1 : 2 Final Selection Rate (Strobe_2) 1
1.5
1 : 12 Rejection Rate FINSEL (VALID_EV-N x Strobe_2) 1 1.5 6
Threshold Pattern, Format 0 1 6
Threshold Pattern, Format 1 1 6
12
Total Byte 18
C. Housekeeping Data: Subcom Format 2
STOF Subcommutated Housekeeping Data, (Subcom Format 2, every 59.92
sec)
AMUX Read- Byte Sub-
ADDR **) see
comment next page Conversion Outs Total
30 Regulator Sweep 2: MAX-Value **) 0.009804 [V] 1 1
30 Regulator
Sweep 2: MIN-Value **) 0.009804 [V] 1 1
29 Regulator Sweep 1:
MAX-Value **) 0.009804 [V] 1 1
29 Regulator Sweep 1:
MIN-Value **) 0.009804 [V] 1 1
28 Regulator HSTOF_HV 0.009804 [V]
1 1
13 Control MCP 2 0.009804 [V] 1 1
12 Control MCP 1 0.009804 [V] 1
1
5 +12 Volt Monitor 0.0645199 [V] 1 1
4 -12 Volt Monitor 0.0588 [V],
Offset -15 [V] 1 1
3 +5 Volt Monitor 0.02168 [V] 1 1
2 -5 Volt Monitor
0.0234 [V], Offset -6 [V] 1 1
14 +12V SEM Power Monitor 0.058823529 [V] 1
1
15 -12V SEM Power Monitor 0.0588 [V], Offset -15 [V] 1 1
1
LV-Converter Current Monitor 1.9608 [mA] 1 1
22 STOF Sweep 2 Current Mon:
MAX-Value **) 0.09804 [mA] 1 1
22 STOF Sweep 2 Current Mon:
MIN-Value **) 0.09804 [mA] 1 1
19 STOF Sweep 1 Current Mon:
MAX-Value **) 0.09804 [mA] 1 1
19 STOF Sweep 1 Current Mon:
MIN-Value **) 0.09804 [mA] 1 1 18
Total Byte 18
D. Housekeeping Data: Subcom Format 3
STOF Subcommutated Housekeeping Data, (Subcom Format 3, every 59.92
sec)
Read- Byte Sub-
Outs Total
Threshold Pattern, Format 2 1 6
Threshold Pattern, Format 3 1
6
Threshold Pattern, Format 4 1 6 18
Total Byte 18
**) "Regulator" (= Stellgröße) und Current der STOF
Sweep Converter lassen sich am Besten erfassen, wenn über die
Akkumulationsperiode (= 1 Housekeeping Paket) der Maximalwert und der
Minimalwert gebildet werden. Dazu sollten die betreffenden Werte in jedem
Voltage-Step ausgelesen werden. Diese Werte werden dann entweder in den
Speicherplatz für den Maximalwert oder den Minimalwert oder gar nicht
eingetragen.
Maximalwert: Zu Beginn der Akkumulationsperiode wird
der betreffende Speicherplatz =0 gesetzt. Ein aktueller Wert
wird nur dann
in den Speicherplatz eingeschrieben, wenn er größer ist als der
gespeicherte Wert.
Minimalwert: Zu Beginn der Akkumulationsperiode
wird der betreffende Speicherplatz =FF gesetzt. Ein aktueller
Wert wird nur
dann in den Speicherplatz eingeschrieben, wenn er kleiner ist als der
gespeicherte Wert.